Stage 3 Microelectronics Manufacture Era

In manufacturing microelectronic devices, CVD processes are used to fabricate several kinds of films made of the following materials [18]  

The research and development of CVD in recent years have focused on solid state microelectronic devices. This rapidly moving technology demands continuously improved materials and processes for the fabrication of even more advanced semiconductor devices. It is well recognized that computer chips would not be manufactured in their current capacity and structure if CVD techniques were not transferred and developed from the material extraction method into the deposition technology. 

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