Spin coating and instabilities in ultrathin resist films

2 Spin coating and instabilities in ultrathin resist films 

Prucker, S. Christian, H. Bock, J. Ruehe, C.W. Frank, and W. KnoU, On the glass transition in ultrathin polymer films of different molecular architecture, Macromol. Chem. Phys. 199, 1435 (1998) J.N.D Amour, C.W. Frank, and U. Okoroanyanwu, Influence of substrate chemistry on the properties of ultra thin polymer films, Microelectron, Eng. 73 74, 209 217 (2004). 

Kalliadasis, C. Bielarz, and G.M. Homsy, Steady free surface thin film flows over topography, Phys. Fluids 12, 1889 1898 (2000). 

For spin-coated ultrathin films, nucleation occurs by a spinodal decomposition phenomena or by airborne particles falling on the surface of the film. Spinodal decomposition proceeds by amplification of surface disturbances on the free surface of the film due to thermal fluctuations or mechanical vibrations. Conjoining forces overwhelm the tendency for surface tension to level the film, thus driving the growth of the surface modulations until they reach the substrate to nucleate a hole. 

---