SSIMS spatial resolution

SSIMS has been used in the TOP SSIMS imaging mode to study very thin layers of organic materials [3.32-3.36], polymeric insulating materials [3.37], and carbon fiber and composite fracture surfaces [3.38]. In these studies a spatial resolution of ca. 80 nm in mass-resolved images was achieved. 

Static SIMS (SSIMS). This operates under non-damaging conditions. It gives good information on molecular content and, like Auger spectroscopy, can be used for surface micro-analysis at high spatial resolution. 

---