Slurry Settling Rate Quantification

1 Slurry Settling Rate Quantification The settling rate measurements were conducted using a Beckman Coulter QuickSCAN Liquid Dispersion [Pg.580]

TABLE 18.2 Required Minimum Flow Velocity (RMFV) of Slurry Blend in the Global Loop, Abrasive Settling Rate (SR), and Stokes Number (St) for Tested CMP Slurries. SR Values Depend on Selected Transmission and Back-Scattering Zones. (A) = Slurry Abrasive Component Only and (B) = Slurry Blend. [Pg.581]

Slurry Abrasive solids, wt% SR, mm/h RMFV, ft/s Stokes Number, St X 10 [Pg.581]

2 Settling Behavior of Different Abrasive CMP Slurries Representative results of transmission and back scattering (the profile graphs), and absolute [Pg.581]

FIGURE 18.9 Transmission and back scattering plots for silica-1 oxide CMP slurry (silica particles). [Pg.582]

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