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Size of Primary Nanoparticles in Silane Plasma

Critical Size of Primary Nanoparticles in Silane Plasma [Pg.572]

Neglecting ion-ion recombination, the particle size growth in the sequence of ion-molecular reactions (8-129)-(8-132) can be described based on (8-137) by the following equation  [Pg.572]

Initially, when the number of atoms, N, is less than a critical value of 1000 atoms (size about 1 ran), the function increases linearly with time. This means that the particle [Pg.572]




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