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Silicon oxides, alcohol vapor adsorption

Gas-Phase Lubrication of MEMS Devices Using Alcohol Vapor Adsorption Isotherm for Lubrication of Silicon Oxides... [Pg.1143]

See other pages where Silicon oxides, alcohol vapor adsorption is mentioned: [Pg.1143]    [Pg.457]    [Pg.370]   


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Adsorption/oxidation

Alcohol vapors

Alcohols adsorption

Oxidation silicones

Oxides adsorption

Oxides silicon oxide

Oxidized silicon

Silicon oxidation

Silicon oxides

Vapor adsorption

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