Silicon hydride plasmas

Marra, D. C., Edelberg, E. A., Nanone, R. L., and Aydil, E. S., Silicon hydride composition of plasma-deposited hydrogenated amorphous and nanocrystalline silicon films and surfaces. 7. Vac. Sci. Technol. A 16, 3199-3210 (1998a). 

Of all the reactions studied, only the synthesis of nitrogen oxides and acetylene in arcs or plasma torches and that of ozone in glow and corona discharges are of major importance. In addition, a few small-scale preparations of inorganic compounds have been developed, e.g. synthesis of hydrazine and of hydrides and halides of silicon, germanium, tin, lead, phosphorus or arsenic 3> ... 

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