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Silicon doping-dependent pore size

Three comprehensive books on porous silicon have been published, wherein detailed information can be found related to silicon anodization (Canham 1997 Lehman 2002 Sailor 2012a). The topics covered include dissolution chemistries and the dependences of porosity, pore morphology, and pore size distribution on various parameters (e.g., wafer type/doping, electrolyte composition, current density, time) additionally, different types of electrochemical cells are discussed (Lehman 2002 Sailor 2012a), as well as some of the more practical aspects related to anodization (Sailor 2012a e.g., wafer preparation, equipment and instrumentation, health and safety). The reader is referred to these references for essential background reading. [Pg.561]


See other pages where Silicon doping-dependent pore size is mentioned: [Pg.1742]    [Pg.461]    [Pg.2448]    [Pg.504]    [Pg.373]    [Pg.1670]    [Pg.42]    [Pg.251]    [Pg.197]    [Pg.3322]    [Pg.1926]   
See also in sourсe #XX -- [ Pg.361 ]




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