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Silicon-based positive photoresist

Preparation of a Novel Silicone-Based Positive Photoresist and Its Application to an Image Reversal Process... [Pg.175]

We have developed a novel silicone-based positive photoresist (SPP) for two-layer resist systems. SPP is composed of an acetylated poly(phenylsilsesquioxane)... [Pg.175]

TANAKA ETAL. Novel Silicone-Based Positive Photoresist... [Pg.179]

See other pages where Silicon-based positive photoresist is mentioned: [Pg.175]    [Pg.185]    [Pg.355]    [Pg.175]    [Pg.185]    [Pg.355]    [Pg.73]    [Pg.251]    [Pg.137]    [Pg.443]    [Pg.1165]    [Pg.18]    [Pg.90]    [Pg.1911]    [Pg.138]    [Pg.389]    [Pg.988]    [Pg.61]    [Pg.960]    [Pg.230]    [Pg.439]    [Pg.480]    [Pg.485]    [Pg.192]    [Pg.965]    [Pg.3632]    [Pg.26]    [Pg.169]   


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Silicon-based

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