Silicon aluminum oxynitride

The dip and spin coating methods are the most practiced techniques as indicated in the open literature. Many materials have been made into porous membranes by this route including the more commonly referenced materials such as metal oxides, silicon carbide, silicon nitride, silicon and aluminum oxynitrides and glasses. 

Materials made of silicon nitride, silicon oxynitride, or sialon-bonded silicon carbide have high thermal shock and corrosion resistance and may be used for pump parts, acid spray nozzles, and in aluminum reduction cells (156—159). A very porous silicon carbide foam has been considered for surface combustion burner plates and filter media. It can also be used as a substrate carrying materials such as boron nitride as planar diffusion source for... 

Nitrides primarily include sihcon rritride Si3N4 and alrtminrtm and silicon oxynitrides, also called sialons, aluminum rritride AIN, and various metallic rritrides, including TiN. 

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