Secondary neutral angle distribution

The interaction of keV particles with solids has been characterized by the measurement of the angle and energy distribution of sputtered secondary ions and neutrals. The results are compared to classical dynamics calculations of the ion impact event. Examples using secondary ions are given for clean Ni 001), Cu 001) reacted with 0>, Ni 001 and Ni 7 9 11 reacted with CO, and Agllll) reacted with benzene. The neutral Rh atoms desorbed from Rh 001 are characterized by multiphoton resonance ionizaton of these atoms after they have left the surface. 

---