Scanning electron microscopy aluminium oxide

Concerning the two-layer model, the thickness and properties of each layer depend on the nature of the electrolyte and the anodisation conditions. For the application, a permanent control of thickness and electrical properties is necessary. In the present chapter, electrochemical impedance spectroscopy (EIS) was used to study the film properties. The EIS measurements can provide accurate information on the dielectric properties and the thickness of the barrier layer [13-14]. The porous layer cannot be studied by impedance measurements because of the high conductivity of the electrolyte in the pores [15]. The total thickness of the aluminium oxide films was determined by scanning electron microscopy. The thickness of the single layers was then calculated. The information on the film properties was confirmed by electrical characterisation performed on metal/insulator/metal (MIM) structures. 

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