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Scalar models for calculating aerial image intensity

1 Scalar models for calculating aerial image intensity [Pg.563]

The scalar models for calculating aerial image intensity neglects the effects of polarization of light. This is a legitimate approximation for numerical apertures less than 0.7. Scalar models are the simplest of the aerial models and come in three main types the zero-order, first-order, and high-NA scalar models. [Pg.563]




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Aerial image

Aerial image models

Calculated images

Intensity calculation

Model calculations

Model image

Scalar

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