Aerial image models

The effects of aherrations on lithographic performance are determined more generally hy incorporating aherrations into the aerial image models. This is done hy modifying the pupil function of the lens to include phase error due to aherrations. ... 

Scalar models for calculating aerial image intensity... 

The scalar models for calculating aerial image intensity neglects the effects of polarization of light. This is a legitimate approximation for numerical apertures less than 0.7. Scalar models are the simplest of the aerial models and come in three main types the zero-order, first-order, and high-NA scalar models. 

Independently proposed hy Mack and Bernard, this model accounts for the effect of a changing aerial image focus (i.e., defocus effect) as it propagates... 

Fig. 31.16. Inlet Reservoir Model simulation of sediment volumes at Sebastian Inlet, Florida, 1950—2050. Solid symbols indicate shoal volumes estimated from topographic data and analysis of aerial images. Solid arrows indicate sand bypass events.

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