Saha-Eggert equation

Local Thermodynamic Equilibrium (LTE). This LTE model is of historical importance only. The idea was that under ion bombardment a near-surface plasma is generated, in which the sputtered atoms are ionized [3.48]. The plasma should be under local equilibrium, so that the Saha-Eggert equation for determination of the ionization probability can be used. The important condition was the plasma temperature, and this could be determined from a knowledge of the concentration of one of the elements present. The theoretical background of the model is not applicable. The reason why it gives semi-quantitative results is that the exponential term of the Saha-Eggert equation also fits quantum-mechanical expressions. 

Secondary Ion Yields. The most successful calculations of secondary in yields are based on the local thermal equilibrium (LTE) model of Andersen and Hinthorne (1973), which assumes that a plasma in thermodynamic equilibrium is generated locally in the solid by ion bombardment. Assuming equilibrium, the law of mass action can be applied to find the ratio of ions, neutrals and electrons, and the Saha-Eggert equation is derived ... 

On the basis of the Saha-Eggert equation, the degrees of ionization for the chemical elements can be calculated for a plasma temperature of 6000 K, an electron number density of 1015 and partition functions according to Ref. [5] (Table 15) [501]. They range from over 99% for sodium to 10 s for chlorine. The argon ICP thus has good prospects for the determination of metals but for non-metals has a number of limitations as a result of these considerations. 

Many attempts have been made to quantify SIMS data by using theoretical models of the ionization process. One of the early ones was the local thermal equilibrium model of Andersen and Hinthome [36-38] mentioned in the Introduction. The hypothesis for this model states that the majority of sputtered ions, atoms, molecules, and electrons are in thermal equilibrium with each other and that these equilibrium concentrations can be calculated by using the proper Saha equations. Andersen and Hinthome developed a computer model, C ARISMA, to quantify SIMS data, using these assumptions and the Saha-Eggert ionization equation [39-41]. They reported results within 10% error for most elements with the use of oxygen bombardment on mineralogical samples. Some elements such as zirconium, niobium, and molybdenum, however, were underestimated by factors of 2 to 6. With two internal standards, CARISMA calculated a plasma temperature and electron density to be used in the ionization equation. For similar matrices, temperature and pressure could be entered and the ion intensities quantified without standards. Subsequent research has shown that the temperature and electron densities derived by this method were not realistic and the establishment of a true thermal equilibrium is unlikely under SIMS ion bombardment. With too many failures in other matrices, the method has fallen into disuse. 

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