Safety pyrophoric compounds

General caution and safety. The metal alkyls trimethylaluminum, trimethylgallium, trimethylindium, triethylindium, dimethylzinc, and diethyl-zinc all spontaneously inflame in air (pyrophoric) and are violently reactive toward water and carbon dioxide. Dimethylcadmium fumes upon exposure to air but does not inflame, and decomposes, sluggishly, in water. As with cadmium dichloride, and in common with all cadmium compounds, dimethylcadmium is extremely toxic. A dry powder extinguisher, sand bucket, and fire blanket should be at hand at all times. 

Safety issues are particularly important for CVD since many of the source compounds are toxic and disposal of waste products, e.g., HCl, is often problematic. Additional problems can occur if the reactants are pyrophoric (ignite in contact with air). Table 28.4 lists some of the source gases used in CVD and their potential hazards. Silane is widely used in the semiconductor industry and was the cause of a major explosion and fire at a manufacturing plant in Moses Lake, WA. The incident caused a number... 

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