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Resolution limits due to line edge roughness

Sturtevant, J.R. Alvis, N. Benavides, D. Bonser, N. Cave, C. Nelson Thomas, W.D. Taylor, and [Pg.825]

Tumquest, Experimental determination of the impact of polysilicon LER on sub 100 nm transistor performance, Proc. SPIE 4344, 809 814 (2001). [Pg.825]

See other pages where Resolution limits due to line edge roughness is mentioned: [Pg.825]   


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