Resistance of metal films

The energetic particle bombardment also improves the surface coverage and decreases the pinhole porosity in the deposited film. This increased density and better surface coverage is reflected in film properties such as better corrosion resistance, lower chemical etch rate, higher hardness,lowered electrical resistivity of metal films, lowered gaseous and water vapor permeation through the film, and increased index of refraction of dielectric films. 

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