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Refractory metals and ceramics

A.W. Moore. Mater. Res. Soc. Symp. Proc, 1992, 250 (Chemical Vapor Deposition of Refractory Metals and Ceramics II) 269 (1992). [Pg.616]

T. M. Besmann, B. M. Gallois, eds., MRS Symp. Proc., Vol. 168 Chemical Vapor Deposition of Refractory Metals and Ceramics, Material Research Society, Pittsburgh, 1990. [Pg.150]

Chemical Vapour Deposition of Refractory Metals and Ceramics, Boston, MA, USA, 1989 [109]... [Pg.19]

Chemical vapour deposition of refractory metals and ceramics. Materials Research Society, Pittsburgh, PA, ppl99-204... [Pg.22]

Buiting Ml, Reader AH (1990) Influence of impurityes and micro structure on the resistivity of LPCVD titanium nitride films. In Besmann TM, Gallois BM (eds) Chemical vapour deposition of refractory metals and ceramics. Materials Research Society, Pittsburgh, PA, ppl 99-204... [Pg.23]

Sotirchol SV, Papasoiliotis GD (1992) Kinetic modeling of the deposition of SiC from methyltrichlorosilane. In Besmann T M, Gallois B M, Warren J W (eds) Chemical vapor deposition refractory metals and ceramics II. Materials Research Society, Pittsburgh, PA, pp.35M0... [Pg.163]

See other pages where Refractory metals and ceramics is mentioned: [Pg.75]    [Pg.196]    [Pg.75]    [Pg.1012]    [Pg.171]    [Pg.172]    [Pg.175]    [Pg.175]    [Pg.176]    [Pg.176]    [Pg.177]    [Pg.177]    [Pg.178]    [Pg.179]    [Pg.186]    [Pg.187]    [Pg.19]   
See also in sourсe #XX -- [ Pg.19 ]



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