Reflectors dynamic scattering

A final practical note involves instrument intensity measurement calibrations. The intensity measurement is self-calibrating relative to the incident beam from the source. However, measurements typically have a dynamic range of 10 -10 , and care must be taken to insure the detection system is linear. A method of calibrating the scatterometer is to characterize a diffuse reflector having a known scattering characteristic. For example, a surface coated with BaS04 makes a nearly Lambertian scatterer, which has a BRDF of 1/Jt at all angles. 

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