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Real-time spectroscopic ellipsometry

Table 2.4 Chrraiology and other particulars of ellipsometry (E), spectroscopic ellipsometry (SE), and real-time spectroscopic ellipsometry (RTSE)... Table 2.4 Chrraiology and other particulars of ellipsometry (E), spectroscopic ellipsometry (SE), and real-time spectroscopic ellipsometry (RTSE)...
Y.-T. Kim, D. L. Allara, R. W. Collins, K Vedam, Real-time spectroscopic ellipsometry... [Pg.79]

With the development of multichaimel spectroscopic ellipsometry, it is possible now to use real-time spectroscopic ellipsometers, for example, to establish the optimum substrate temperature in a film growth process [44, 42]. [Pg.1888]

Rapid advances in computer technolc during the past decades have made possible the automation of ellipsometry instruments and data analysis [5]. Developments in spectroscopic ellipsometry, based on rapid data collection, can offer the real-time characterization of dynamic behavior of thin layers [33,34], including the evaluation of structural changes, phase separation, or the swelling of polymer films [17]. [Pg.304]

See other pages where Real-time spectroscopic ellipsometry is mentioned: [Pg.104]    [Pg.149]    [Pg.425]    [Pg.55]    [Pg.38]    [Pg.257]    [Pg.304]   
See also in sourсe #XX -- [ Pg.76 , Pg.77 ]



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Spectroscopic ellipsometry

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