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3 Quantitative Control of Chemical Vapour Deposition Process Parameters [Pg.229]

1 Quantitative Control Method Based on Chemical Reaction Mechanism [Pg.229]

1 Free Volume Fraction and Critical Residence Time [Pg.229]

Chemical Vapour Deposition Pyrolytic Carbon from CH4 [Pg.231]

As another example, Huttinger [34, 35] has developed a synthesis reaction model based on experiments. This section introduces the work to illustrate the complex reactions and demonstrates the relationship between the chemical reactions and residence time. [Pg.231]