PVDF and FEP Films

The sputter deposition of PVDF and FEP films has not been widely reported in the open literature. In this work, both materials have been studied with films deposited in the thickness range 30 nm to 4 pm. The processing conditions that have been used are summarized in Table 19.1. Generally the films that were formed were adherent, although more prone to degradation during deposition than the PTFE films. 

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