Process microelectronic mechanical system

In the traditional surface science approach the surface chemistry and physics are examined in a UHV chamber at reactant pressures (and sometimes surface temperatures) that are normally far from the actual conditions of the process being investigated (catalysis, CVD, etching, etc.). This so-called pressure gap has been the subject of much discussion and debate for surface science studies of heterogeneous catalysis, and most of the critical issues are also relevant to the study of microelectronic systems. By going to lower pressures and temperatures, it is sometimes possible to isolate reaction intermediates and perform a stepwise study of a surface chemical mechanism. Reaction kinetics (particularly unimolecular kinetics) measured at low pressures often extrapolate very well to real-world conditions. 

The bedrocks of the theoretical and computational methods that allow study of relationships between molecular and mesoscopic scale events and system properties are quantum and statistical mechanics. Thus, this volume comprises chapters that describe the development and application of quantum and statistical mechanical methods to various problems of technological relevance. The application areas include catalysis and reaction engineering, processing of materials for microelectronic applications, polymer science and engineering, fluid phase equilibrium, and combinatorial methods for materials discovery. The theoretical methods that are discussed in the various... 

An actuator is a functional element which connects the information processing part of an electronic control system with a technical or nontechnical part, e. g. biological, process. Actuators can be used to control the flow of energy, mass or volume. The output of an actuator is energy or power, often available in the form of a mechanical working capacity force times displacement . The actuator input is always driven by very low electrical power, ideally without any power consumption, with currents and voltages which are, if possible, microelectronically (e. g. TTL) compatible [1]. 

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