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Problems of Poly-Si gate electrodes

The use of n+ poly-Si as gate electrode material has certain limitations. Among these limitations are  [Pg.150]

In the following section we will show that tungsten as the metal gate can possibly solve these issues. A very attractive property of refractory metals, such as Mo, W, Ti and Ta, is that they have mid gap workfunctions which is very beneficial in CMOS technology. [Pg.151]


See other pages where Problems of Poly-Si gate electrodes is mentioned: [Pg.150]   


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