Power devices Microelectromechanical systems

MEMS (microelectromechanical systems) are devices made by the integration of mechanical elements, sensors, actuators, and electronics on a common Si substrate through microfabrication technology [1]. MEMS find applications in areas such as sensors, actuators, power-producing devices, telecommunications, chemical reactors, biomedical devices, etc. [2,3]. In MEMS components, the electrostatic and other surface forces become predominant when compared with inertial and gravitational forces because of the large ratios of surface area to volume, and hence the performance of MEMS components is limited by the nature of the surface. Therefore, contact-related... 

Developing micro-scale technologies have allowed the production of advanced small-scale devices, commonly referred to as microelectromechanical [MEM] systems, which find applications in many areas, such as optics and sensors [23, 60]. The need to power these devices is a driving force for the development of small-... 

---