Polysilicon, plasma enhanced

In the present chapter, we will review the nature of plasma-enhanced CVD (PECVD) films for a variety of applications. We will look at dielectrics (silicon nitride, silicon dioxide), semiconductors (polysilicon, epi silicon) and metals (refractory metals, refractory metal silicides, aluminum). There are many other important films (i.e., amorphous silicon for solar cells and TiN for tool harden-... 

The next three chapters review the deposition of thermally-induced dielectric films (Chapter 3) and metallic conducting films (Chapter 4), as well as plasma-enhanced films of either type (Chapter 5). The many chemical systems employed to create these films are considered, and the nature of the resulting films is presented. Films studied are silicon dioxide, silicon nitride, polysilicon, epitaxial silicon, the refractory metal silicides, tungsten and aluminum. 

Chang J P, Arnold J C, Zau G C H, Shin H-S and Sawin H H 1997 Kinetic study of low energy ion-enhanced plasma etching of polysilicon with atomic/molecular chlorine J. Vac. Sc/. Technol. A 15 1853-63... 

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