Polymeric microdevices fabrication

Kancharla, V.V., Chen, S.C., Fabrication of biodegradable polymeric microdevices using laser micromachining. Biomed. Microdevices 2002, 4(2), 105-109. 

FIGURE 2.23 Scheme for fabrication of plastic microdevices from silicon master using an intermediate soft mold, (a) Silicon structures are fabricated using conventional photolithography and reactive ion etching, (b) PDMS is cured in situ over the silicon master, (c) Polystyrene is hot embossed onto the PDMS mold or polymerized in situ from partially polymerized styrene, (d) Polystyrene replica is separated from the mold [85]. Reprinted with permission from Springer Science and Business Media. 

The processability of certain CEPs has been utilized in the construction of microsystems, particularly miniature sensor systems. For example, simply dip-coating connecting platinum wires with a polyaniline formulation produces a useful humidity sensor.133 CEPs can also be screen-printed or ink-jet-printed to produce the complex shapes needed for various devices. Electrodeposition of CEPs is also a popular processing method, and this technique is compatible with conventional MEMS fabrication, where lithography and etching can be used to prepattern metal electrodes. Subsequent deposition of CEP by electrochemical polymerization produces the CEP microdevice.129... 

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