Plasma Polymerization of Fluorocarbons

Although both neutral and ionic species have been monitored by in situ mass spectrometric analysis of C2p plasmas, this discussion will be largely restricted to the neutral chemistry since in general the amount of polymer deposited relative to the amount of monomer fed into this system is too large for ionic spcies to be solely responsible for the process . This is not, however, to say that the ionic species do not play any role in the polymerization process and the importance of the ions in the plasma polymerization of fluorocarbons will become apparent. 

The twenty chapters included in this volume can be conveniently divided into the following groups review plasma polymerization of hydrocarbons plasma polymerization of fluorocarbons plasma polymerization of organometallic systems plasma-initiated polymerization and applications of plasma polymerization. Though the emphasis of this Symposium is on the fundamental aspects of plasma polymerization, we should not lose sight of the fact that it is the potential applications of this technique that has stimulated the efforts in basic research. Potential applications for plasma-polymerized films include membranes for reverse osmosis, protective coatings for optical components, and insulating layers for semiconductors. 

Kay, E., Cobum, J. and Dilks, A. Plasma Chemistry of Fluorocarbons as Related to Plasma Etching and Plasma Polymerization. 94, 1-42 (1980). 

Plasma Chemistry of Fluorocarbons as Related to Plasma Etching and Plasma Polymerization... 

Although to-date the emphasis has been on plasma polymerized films produced from hydrocarbon based systems, this trend in more recent times has swung towards fluorocarbons in an attempt to produce polymers of similar properties to conventionally prepared linear fluoropolymers. However, it will become clear from the account to follow that in many respects plasma polymerized fluorocarbons differ significantly from their linear counterparts. It is to the plasma polymerization of organic monomers containing solely carbon and fluorine therefore that we shall devote our attention in this section with only brief references to hydrocarbon and fluorohydrocarbon polymers for comparison purposes. 

It seems likely that the Involvement of (CF2)n species Is also prominent In the plasma polymerization of the other fluorocarbons of F/C52. In a subsequent paper (30) we shall demonstrate that this Is Indeed the case. In an Investigation of metal containing polymers produced In plasmas excited In the series of perfluoroalkanes CjjF2n+2 >3,4). ... 

Stoffels, W. W. Stoffels, E. Tachibana, K. (1998).Polymerization of Fluorocarbons in Reactive Ion Etching Plasmas. Journal of Vacuum Science Technology A, V0I.I6, No.l, Ganuary/February 1998), pp. 87-95, ISSN 0734-2101... 

Stoflfels W, Stoflfels E, Tachibana K. Polymerization of fluorocarbons in reactive ion etching plasmas. J Vac Sci Technol A 1998 16 87-95. 

---