Photochemical image enhancement

A second major development in photolithographic chemistry has been that of image enhancement by photobleaching. A number of different variations on this theme exist the primary ones are contrast enhancement (C L) (5), photochemical image enhancement (PIE) (6-9), and built-on mask (BOM) (10). CEL was the first of these to appear in this process a polymer containing a bleachable dye is spun on top of the resist, and both are exposed together. We originated the PIE system shortly thereafter it likewise uses a top layer of... 

This time-resolved measurement method can be applicable to relatively slow transient phenomena, as its time-resolved measurements are undertaken while the movable mirror is at rest. The number of applications of step-scan FT-IR spectrometry to time-resolved measurements currently is more than that by any other method, and it has been applied to various studies in many fields such as studies of biomolecules, liquid crystals, polymers, photochemical reactions in zeolites, oxidation-reduction reactions on electrode surfaces, and excited electronic states of inorganic complexes. Further, this method has been applied to time-resolved measurements in combination with attenuated total reflection (ATR) (see Chapter 13), surface-enhanced infrared absorption (see Section 13.2.2) [10, 11], infrared microscopic measurements (see Chapter 16) [12], and infrared spectroscopic imaging (see Chapter 17) [13]. 

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