PFC recovery and recycling

For the PFC recovery and recycling technique, the most popular concept is to concentrate and recover PFC on site and to purify off-site. 

The most important problem in organizing the PFC recovery and recycling system is the PFC concentration technique. In the semiconductor process, inflammable toxic... 

Applications of semiconductors will increase more and more in the future, and both quality and quantity would be expanded. For the material, silicon will also be used extensively in the future, and for etching and cleaning, fluorine compounds are essential. However, protection of the global environment is an urgent and serious problem. For the effective utilization of fluorine resources, the combination of the improvement of PFC gas decomposition ratio with PFC recovery and recycling would be the most environmentally compatible method. 

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