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Petal-shaped diaphragm

Fig. 10 (a) Schematic representation of a petal-shaped diaphragm before actuation and upon actuation and (b) a view of the petal-shaped diaphragm made of a tri-layer polymer substrate (Reprinted with permission from Fang and Tan 2010. Copyright (2010) Elsevier Limited)... [Pg.269]

The pump based on a petal-shaped diaphragm (it is multi-piece as opposed to other single-piece diaphragm pumps) is shown in Fig. 1. The diaphragm of this pump, fabricated through PDMS-based MEMS processes, is made of trilayer polymer... [Pg.386]

See other pages where Petal-shaped diaphragm is mentioned: [Pg.258]    [Pg.268]    [Pg.258]    [Pg.268]   
See also in sourсe #XX -- [ Pg.268 ]



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