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Pertinent Topics from Atomic, Molecular, and Optical Physics

Pertinent Topics from Atomic, Molecular, and Optical Physics [Pg.12]

For chemical etching, polyatomic halogen-bearing molecules are often used. Electron collisions with these molecules often lead to negative ions through electron dissociative attachment, [Pg.13]

The determination of electron-collision cross sections over a broad range of kinetic energy cannot be accomplished in a single experiment, and requires the [Pg.13]

One particular area where theoretical studies are especially appropriate concerns electronically excited states of molecules, which should be abundant in a chemically reactive plasma. Apart from metastable states, it is in general difficult to prepare excited states of molecules, and especially of radicals, in a [Pg.15]

Reactions of CH4 and SiH4 with Metastable States and Ions of Rare Gases [Pg.15]




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