Pattern Dependence of High-Selectivity Slurry

The crystal structure and grain size were analyzed with a diffractometer (RINT/DMAX-2500, Rigaku, Japan) using Cu-Ka radiation (X = 0.1542 

Sample Slurry pH Temperature (°C) Dry Wet Concentration (wt%) Molecular Weight pH 

50% Density Horiz Line 10% Density 80% Density 70% Density 50% Density 

50% Density 40% Density 3% Density 60% Density 50% Density Horiz Line 

1 um Pitch 5 um Pitch SEM Struct 20 um Pitch 100 um Pitch 500 um Pitch 

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