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Vapour deposition from organometallic compounds

Aylett, B. J., and Tannahill, A. A., Chemical Vapour Deposition of Metal Silicides from Organometallic Compounds with Silicon-Metal Bonds, SIRA Int. Seminar on Thin Film Preparation and Processing Technolgy, Brighton, UK (March 1985)... [Pg.341]

See other pages where Vapour deposition from organometallic compounds is mentioned: [Pg.69] [Pg.69] [Pg.167] [Pg.533] [Pg.323] [Pg.154] [Pg.178] [Pg.84] [Pg.78]

See also in sourсe #XX -- [ Pg.68 , Pg.69 , Pg.70 ]

See also in sourсe #XX -- [ Pg.68 , Pg.69 , Pg.70 ]

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From organometallic compounds

From organometallics