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Optical scatterometry

Abdulhalim I (2007) Simplified optical scatterometry for periodic nano-arrays in the quasistatic limit. Appl Opt 46 2219-2229... [Pg.101]

Optical scatterometry (see the summary for this technique) gives averaged, not individual, information. The depth resolution achievable is 0.1 nm RMS, and long and short range roughness can be separated (i.e., measurement provides information as a function of roughness frequency range). [Pg.283]

Diffuse reflection Optical reflection in many directions. Diffuse reflection is due to surface roughness on the order of the wavelength of the light or greater. Also called Non-spectral reflection. See also Scatterometry Spectral reflection. [Pg.598]

See other pages where Optical scatterometry is mentioned: [Pg.54]    [Pg.54]    [Pg.695]    [Pg.695]    [Pg.696]    [Pg.704]    [Pg.715]    [Pg.717]    [Pg.719]    [Pg.721]    [Pg.773]    [Pg.773]    [Pg.78]    [Pg.54]    [Pg.54]    [Pg.695]    [Pg.695]    [Pg.696]    [Pg.704]    [Pg.715]    [Pg.717]    [Pg.719]    [Pg.721]    [Pg.773]    [Pg.773]    [Pg.78]    [Pg.711]    [Pg.713]    [Pg.248]   
See also in sourсe #XX -- [ Pg.54 , Pg.704 ]



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