O-Chloro-m-cresol-formaldehyde Novolak

Figure 1. Dissolution rates of a composite resist made of a diazonaphthoquinone sensitizer and o-chloro-m-cresol-formaldehyde Novolak resin after 5 /cm2 electron beam exposures. Note this kind of an induction period appeared only in the high-molecular-weight fraction resin.

Figure 4. UV-absorption spectra of Varcum resin (solid line), o-chloro-m-cresol-formaldehyde Novolak resin (long dotted line), and m-cresol-benzaldehyde Novolak resin (short dotted line) 0.32- thick films were...

Figure 7. Wide band ESCA spectra of o-chloro-m-cresol-formaldehyde Novolak resin (a) original films, (b) after 1.5 hr UV exposure.

---