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Novolak deep-UV PCM

Figure 24. Uncapped images delineated with the Novolak/PMMA deep-UV PCM system. A GCA Mann DSW4800 aligner with 0.28-NA and 436-nm wavelength was used. The smallest openings are of 0.8 /iw nominal dimension. (Reproduced with permission from Ref. 46.)... Figure 24. Uncapped images delineated with the Novolak/PMMA deep-UV PCM system. A GCA Mann DSW4800 aligner with 0.28-NA and 436-nm wavelength was used. The smallest openings are of 0.8 /iw nominal dimension. (Reproduced with permission from Ref. 46.)...
See other pages where Novolak deep-UV PCM is mentioned: [Pg.314]    [Pg.315]    [Pg.330]    [Pg.335]    [Pg.339]    [Pg.343]    [Pg.348]    [Pg.314]    [Pg.315]    [Pg.330]    [Pg.335]    [Pg.339]    [Pg.343]    [Pg.348]    [Pg.305]    [Pg.306]    [Pg.328]    [Pg.337]    [Pg.346]    [Pg.102]    [Pg.96]   
See also in sourсe #XX -- [ Pg.314 ]



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