Niobium nuclear fuel reprocessing

The major use of C1F3 is in the nuclear industry which converts unclean spent fuel reprocessing, uranium metal into gaseous uranium hexafluoride. Other applications are low temperature etchant for single crystalline silicon [63,64], It is also used as a fluorinating reagent and in the synthesis of GIF and conversion of metals to metal fluorides such as tantalum and niobium metals to tantalum pentafluoride and niobium pentafluoride, respectively. 

---