Negative electron resist chloromethylated polystyrene

Pulse Radiolysis Studies on the Mechanism of the High Sensitivity of Chloromethylated Polystyrene as an Electron Negative Resist... 

Chloromethylated polystyrene and chloromethylated poly(a-methyIstyrene) are negative type resists having high sensitivity and high resolution. In the pulse radiolysis of solid films of this polymer, the absorption spectra of substituted benzyl-type polymer-radical and the charge transfer complex between phenyl rings and chlorine atoms were observed (Fig. 17) [59], The benzyl-type radical may be produced by the dissociative electron attachment to the benzyl part of chloromethylated polystyrene (CMS). 

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