Nanosized oxygen content

Table 9.2 Oxygen content of nanosized AIN powders and ceramics samples, sintered without sintering additives.

Recently, chemical vapor deposition (CVD) methods based on single source raw materials have been used to synthesize nanosized powders. High-purity, low-oxygen-content nanosized SiC powders have been successfully produced by Huang et al. using CVD of dimethyldichlorosilane (DMS) at temperatures from 1100 to 1400 °C [89]. The powders grown at 1400 °C were SiC crystallites, while those grown below 1300 °C consisted of amorphous phases and SiC crystallites. 

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