Nanopatterning and Nanodevices

thin insulating barriers, or templates are the elements directly fabricated by AFM oxidation nanolithography. However, a combination of these elements enables the fabrication of a wide variety of nanoscale patterns and nanomechanical or nanolectronic devices. 

Sophisticated nanolectronic devices such as SiNW transistors and circuits have been fabricated by AFM oxidation nano-lithography. In this application, AFM oxidation generates a narrow oxide mask on top of the active layer of a silicon-on-insulator substrate. The unmasked silicon layer is then removed by using 

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