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N-type silicon films

Tanaka, H. et al. 2007. Spin-on n-type silicon films using phosphorous-doped polysilane. Jpn. J. Appl. Phys. 46 L886-L888. [Pg.155]


See other pages where N-type silicon films is mentioned: [Pg.152]    [Pg.153]   
See also in sourсe #XX -- [ Pg.153 ]




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