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Microwave discharge coating

In microwave plasma, electrons adhere to the wall because the microwave energy propagates on surface. In this case, the inner surface of the vacuum chamber becomes the core of the luminous gas phase for LCVD. If the inner surface of a vacuum chamber is the main substrate surface on which LCVD coating is aimed, such as the case of the coating the irmer surface of a plastic bottle, the microwave discharge is the most efficient LCVD. [Pg.31]

The coating variation offered by the microwave system may be a result of the short residence time of the gas in the discharge. Investigations with the microwave discharge have only recently been started however, the unusual character of the product makes this system very promising for production of new materials. [Pg.321]

Yuji, T. Urayama, T. Fujii, S. Mungkung, N. Akatsuka, H. (2008), Temperature Behavior of Atmospheric-Pressure Non-Equilibrium Microwave Discharge Plasma Jets for Poly(ethylene naptharateJ-Surface Processing. Surface Coatings Technology, Vol. 202, No. 22-23, (August 2008), pp. 5289 5292, ISSN 0257-8972... [Pg.308]

Glow-discharge plasma Microwave RF Low (0.1 - 10/im/h) Good Coating... [Pg.309]


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Microwave discharge

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