Microtools surface quality

In EMM, microtool surface finish is very important since it directly affects the mechanical strength of the tool [33] as well as machining accuracy. Therefore, precise microtools of micron scale size with a good surface quality are preferred while fabricating microfeatures like microhole, microgrooves, 3D cavities, and complex profiles. Microtools are generally fabricated in situ in an EMM setup or fabricated by other methods and are used in EMM. Machining accuracy improves with a reduction in... 

Surface quality of the microtool machined at various voltages [26]. 

Figure 6.18 shows SEM images of a disk microtool fabricated by selective electrochemical dissolution in EMM, and surface quality of machined surfaces at various applied voltages. It can be... 

Microtool is an integral part of any micromachining and nanofabrication operations. In recent years, there is significant breakthrough in fabrication of microtools. Chapter 6 presents different types of EMM tools which have been identified and discussed for the first time. Design and developments of microtools have also been reported. Different features of microtool such as, shape, size, and surface quality fabricated by EMM have also been highUghted in this chapter. 

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