Microscale processing techniques

Multilayer coatings or hlms have been proven to be successful in various applications, especially for wear protection. In multilayer systems, the intrinsic stress can be effectively reduced by designing interface number and composite materials in terms of the application and process technique. Therefore, the multilayer technique by which a specihe functional composite is able to approach received more attention for many years [17,18]. Here we introduce the results on microscale friction and scratch of DLC/DLC and Fe-N/TiN multilayers. 

With an understanding of the structure and properties of engineering materials now firmly in place, we can discuss how these materials can be formed or fabricated into useful products and components. Most of the important processing methods are described here, with little or no distinction made between microscale and macroscale processes—for example, processes that form both integrated circuits and components for highway bridges are described here. The common thread is that all the chemical and physical phenomena needed to introduce these processing techniques have already been described in the previous chapters. 

Before considering the use of conjugated polymers for MEMS and microsystems, two things should be considered the properties of these polymers at the microscale and the processing techniques that can be used to pattern them. 

Powder Techniques. Highly alloyed materials made by the processes described are particularly susceptible to segregation of alloying elements during solidification both on a macro- and a microscale. Much plastic working was necessary to minimise this susceptibiUty before service appHcations. 

The investigation of microscale heat transfer involves the implementation of experimental techniques at the microscale level. Few decades ago this was almost impossible for many areas to access to measurements at the microscale level. The parameters governing the evaporation/condensation process have a localised effect necessitating measurement of velocity, temperature, heat flux on the microscale. 

Emulsion polymerization is a powerful technique for developing products for a wide range of industry. The process can be used for the development of structured products in the nano- to microscales. Some of the key advantages of the process are the use of mild conditions, the near-complete conversion of monomers, the minimization of separation and recycling, the improved heat and mass transfer, and the improved environmental benefits due to the use of a water medium. However, the process is complex and requires careful modeling and scale-up. The prediction of process behavior, the key product properties, and the control of emulsion polymerization systems in particu-... 

To build an efficient, high-quality microscale fuel cell, microfabrication techniques need to be combined with appropriate materials such as Nation based membrane electrode assemblies (MEAs). These techniques must be able to produce three-dimensional structures, allow reactant and product flow into and out of the device, process appropriate materials, and should be of low cost. Fortimately, traditional thin film techniques can be modified for microscale fuel cell fabrication, while maintaining their advantages of surface preparation, sensor integration, and finishing or packaging. In addition, other techniques are also available and are discussed in the following sections. 

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