Microlens Arrays Fabricated by Hot Intrusion

Focal length/of microlens arrays as function of pneumatic pressure and aperture diameter d. Source Zeng, X. and H. Jiang. 2008. Journal of Microelectromechanical Systems, 17(5), 1210-1217. With permission.) 

Silicon substrate Nickel mold insert PC film 

Fabrication sequences of micro-hot intrusion, (a) Mold insert and polycarbonate film, (b) Micro-hot intrusion at elevated temperature and pressure, (c) Release of silicon substrate, (d) Release of plastic lenses. Source Pan, L.W., X. Shen, and L. Lin. 2004. Journal of Microelectromechanical Systems, 13(6), 1063-1071. With permission.) 

Wu and G. M. Whitesides, Fabrication of diffractive and micro-optical elements using microlens projection lithography, Advanced Materials, vol. 14, pp. 1502-1506, Oct 2002. 

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