Microhotplate platforms

B. Panchapakesan, D.L. DeVoe, "Microhotplate platforms for chemical sensor research," Sensors and Actuators B 77, 579-591 (2001). 

Andio MA, Browning PN, Morris PA, Akbar SA (2012) Comparison of gas sensor performance of Sn02 nano-structures on microhotplate platforms. Sens Actuators B 165 13-18... 

A micrograph of the single-ended hotplate-based microsystem is shown in Fig. 6.2 and features a die size of 5.0 x 2.9 mm. This system is a minimal implementation of a temperature-controlled microhotplate system. Temperature modulation is facilitated by an direct access to the input voltage A modulation of the input voltage is translated into a modulation of the microhotplate temperature. Another interesting application of the system includes its use as a microcalorimeter or as a material research platform [145]. The schematic of the temperature-control loop is shown in Fig. 6.3. 

Meier, D. C., Semandk, S., Button, B., Strelcov, E. and Kolmakov, A. (2007), Coupling nanowire chemiresistors with MEMS microhotplate gas sensing platforms , Appl. Phys. Lett., 91,063118. 

---