Microelectronics small area requirement

Laterally inhomogeneous films and patterned structures of microelectronic and optoelectronic applications require small measuring spots. Today s measurements in 50 pm X 50 pm areas are standard for p-spot spectroscopic ellipsometers used in fa-blines. Areas more than ten times smaller can be analyzed by use of discrete-wave-length ellipsometers equipped with laser-light sources. 

Traditionally, UV curable polymers have been utilized as coatings for wood and vinyl floors, but their applications have increased dramatically over the last twenty years to encompass many diverse areas, including optical fiber coatings (7), adhesives (2), disc replications (3-5), and microelectronics (6). This widespread use of UV cross-linked systems is attributed to their rapid, energy efficient curing and their solvent free, one piece formulations. Typically, UV curable systems require only a small fraction of the power normally utilized in thermally cured systems and their solvent free nature offers an environmentally safer alternative. 

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