Microelectronics devices analytical approaches

Chemically modified electrodes (CMEs) represent a modern approach to electrode systems. These electrodes rely on the placement of a reagent onto the surface, to impart the behavior of that reagent to the modified surface. Such deliberate alteration of electrode surfaces can thus meet the needs of many electroanalytical problems, and may form the basis for new analytical applications and different sensing devices. Such surface functionalization of electrodes with molecular reagents has other applications, including energy conversion, electrochemical synthesis, and microelectronic devices. 

Analytical Approaches and Expert Systems in the Characterization of Microelectronic Devices... 

All materials will, to some degree, be subject to corrosion and oxidation by their environment, and the critical early stages of attack can often be understood through the use of surface analytical techniques. A similar approach is required to gain an understanding of the fundamental and applied aspects of surface catalysis, which is of great importance in the petrochemical industry. The microelectronics industry has also contributed to the development of modern surface analytical techniques, where there is a necessity to analyse dopant concentration profiles while retaining lateral resolution on the device of better than one micron. 

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